|
|
|
|
|
|
FEI Sirion LaserStage, inside and outside chamber
LaserStage LS100 can be fitted to several
scanning electron microscopes. It is shown, on the left,
fitted in the chamber of a FEI Quanta, Inspect-F or Sirion scanning electron microscope.
On the right it is shown outside the SEM chamber.
LS100 is usually fitted to the SEM together with its own 2.5nm resolution laser interferometry system,
and is supplied with full electronic, software and user interface systems. It can be interfaced with
NPGS ,
Xenos XPG2 and Xenos XeDraw2 pattern generator/CAD tools.
If, instead of an SEM based solution, you want a complete, reasonably priced, E-beam Lithography System,
designed and optimised for the purpose and with thermal field emission for the finest and quickest results
visit our S100 page.
|
e-beam lithography |
design & simulation software |
All rights reserved © 2008 Softsim Limited
|
|
|
|
